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Basic Info

  • Grade: Pharmaceutical Grade

    Factory Location: Building A311, Building A, No. 1255 Jinhai Road, Pudong New Area, Shanghai (Dingxin Building)

    Main Sales Markets: North America,Central/South America,Western Europe,Eastern Europe,Australasia,Asia,Middle East,Africa

  • Sample Provided: no

    Payment Terms: L/L

    Specifications   
    Purity  99.998
    Oxygen + Argon ≤1 ppmv
    Nitrogen  ≤1 ppmv
    Carbon Monoxde ≤1 ppmv
    Carbon Dioxide ≤1 ppmv
    THC as CH4 ≤1 ppmv
    TCS ( Total Chlorosilanes ) ≤ 0.2 ppmv
    Higher silane  ≤ 50 ppmv
    Silane ≤ 200 ppmv
    Water ≤ 1 ppmv
       
    Ship  
    DOT Shipping Name  Compressed Gas Flammable, NOS ( Disilane )
    DOT Classification 2.1  ( Flammable Gas )
    DOT Label  Flammable Gas
    UN Number  UN 1954
    CAS No. 1590-87-0
    CGA/DISS/JIS 350/632/W22-14L
    Shipped as  LiquefiedGas
       
    Technical Information  
    Cylinder State @ 21.1°C  Liquid
    Flammable Limits In Air  2-98%
    Auto Ignition Temperature (°C ) -100
    Molecular Weight (g/mol) 62.22
    Specific gravity (air =1) 2.1
    Critical Temperature ( °C ) 150.85
    Critical Pressure ( psig ) 747
       
    Applications  
    .Mainly used for miniaturization semiconductors manufacturing process in the high spedd and low temperature deposition of uniform thin films .                                                              .The core applicitons such as process below 20nm node IC semiconductors , advanced memory chips ( DRAM/NAND Flash ), also used in gas mixture for HIT solar cells , LTPS TFT/LCD display panels , and LED .
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